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Fabrication of multiple nanopores in a SiN(x) membrane via controlled breakdown

This paper reports a controlled breakdown (CBD) method to fabricate multiple nanopores in a silicon nitride (SiN(x)) membrane with control over both nanopore count and nanopore diameter. Despite the stochastic process of the breakdown, we found that the nanopores created via CBD, tend to be of the s...

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Detalles Bibliográficos
Autores principales:	Wang, Yunlong, Ying, Cuifeng, Zhou, Wenyuan, de Vreede, Lennart, Liu, Zhibo, Tian, Jianguo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5775244/ https://www.ncbi.nlm.nih.gov/pubmed/29352158 http://dx.doi.org/10.1038/s41598-018-19450-7

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