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Gas-assisted silver deposition with a focused electron beam

Focused electron beam induced deposition (FEBID) is a flexible direct-write method to obtain defined structures with a high lateral resolution. In order to use this technique in application fields such as plasmonics, suitable precursors which allow the deposition of desired materials have to be iden...

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Detalles Bibliográficos
Autores principales:	Berger, Luisa, Madajska, Katarzyna, Szymanska, Iwona B, Höflich, Katja, Polyakov, Mikhail N, Jurczyk, Jakub, Guerra-Nuñez, Carlos, Utke, Ivo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Beilstein-Institut 2018
Materias:	Full Research Paper
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5789381/ https://www.ncbi.nlm.nih.gov/pubmed/29441267 http://dx.doi.org/10.3762/bjnano.9.24

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