Electric Characteristic Enhancement of an AZO/Si Schottky Barrier Diode with Hydrogen Plasma Surface Treatment and Al(x)O(x) Guard Ring Structure

In this study, the design and fabrication of AZO/n-Si Schottky barrier diodes (SBDs) with hydrogen plasma treatment on silicon surface and Al(x)O(x) guard ring were presented. The Si surface exhibited less interface defects after the cleaning process following with 30 w of H(2) plasma treatment that...

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Detalles Bibliográficos
Autores principales: Li, Chien-Yu, Cheng, Min-Yu, Houng, Mau-Phon, Yang, Cheng-Fu, Liu, Jing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5793588/
https://www.ncbi.nlm.nih.gov/pubmed/29316726
http://dx.doi.org/10.3390/ma11010090

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5793588/
https://www.ncbi.nlm.nih.gov/pubmed/29316726
http://dx.doi.org/10.3390/ma11010090

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