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Electric Characteristic Enhancement of an AZO/Si Schottky Barrier Diode with Hydrogen Plasma Surface Treatment and Al(x)O(x) Guard Ring Structure
In this study, the design and fabrication of AZO/n-Si Schottky barrier diodes (SBDs) with hydrogen plasma treatment on silicon surface and Al(x)O(x) guard ring were presented. The Si surface exhibited less interface defects after the cleaning process following with 30 w of H(2) plasma treatment that...
Autores principales: | Li, Chien-Yu, Cheng, Min-Yu, Houng, Mau-Phon, Yang, Cheng-Fu, Liu, Jing |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5793588/ https://www.ncbi.nlm.nih.gov/pubmed/29316726 http://dx.doi.org/10.3390/ma11010090 |
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