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Microwave Backscatter-Based Wireless Temperature Sensor Fabricated by an Alumina-Backed Au Slot Radiation Patch

A wireless and passive temperature sensor operating up to 800 °C is proposed. The sensor is based on microwave backscatter RFID (radio frequency identification) technology. A thin-film planar structure and simple working principle make the sensor easy to operate under high temperature. In this paper...

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Detalles Bibliográficos
Autores principales: Lu, Fei, Wang, Haixing, Guo, Yanjie, Tan, Qiulin, Zhang, Wendong, Xiong, Jijun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5795512/
https://www.ncbi.nlm.nih.gov/pubmed/29337879
http://dx.doi.org/10.3390/s18010242
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author Lu, Fei
Wang, Haixing
Guo, Yanjie
Tan, Qiulin
Zhang, Wendong
Xiong, Jijun
author_facet Lu, Fei
Wang, Haixing
Guo, Yanjie
Tan, Qiulin
Zhang, Wendong
Xiong, Jijun
author_sort Lu, Fei
collection PubMed
description A wireless and passive temperature sensor operating up to 800 °C is proposed. The sensor is based on microwave backscatter RFID (radio frequency identification) technology. A thin-film planar structure and simple working principle make the sensor easy to operate under high temperature. In this paper, the proposed high temperature sensor was designed, fabricated, and characterized. Here the 99% alumina ceramic with a dimension of 40 mm × 40 mm × 1 mm was prepared in micromechanics for fabrication of the sensor substrate. The metallization of the Au slot patch was realized in magnetron sputtering with a slot width of 2 mm and a slot length of 32 mm. The measured resonant frequency of the sensor at 25 °C is 2.31 GHz. It was concluded that the resonant frequency decreases with the increase in the temperature in range of 25–800 °C. It was shown that the average sensor sensitivity is 101.94 kHz/°C.
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spelling pubmed-57955122018-02-13 Microwave Backscatter-Based Wireless Temperature Sensor Fabricated by an Alumina-Backed Au Slot Radiation Patch Lu, Fei Wang, Haixing Guo, Yanjie Tan, Qiulin Zhang, Wendong Xiong, Jijun Sensors (Basel) Article A wireless and passive temperature sensor operating up to 800 °C is proposed. The sensor is based on microwave backscatter RFID (radio frequency identification) technology. A thin-film planar structure and simple working principle make the sensor easy to operate under high temperature. In this paper, the proposed high temperature sensor was designed, fabricated, and characterized. Here the 99% alumina ceramic with a dimension of 40 mm × 40 mm × 1 mm was prepared in micromechanics for fabrication of the sensor substrate. The metallization of the Au slot patch was realized in magnetron sputtering with a slot width of 2 mm and a slot length of 32 mm. The measured resonant frequency of the sensor at 25 °C is 2.31 GHz. It was concluded that the resonant frequency decreases with the increase in the temperature in range of 25–800 °C. It was shown that the average sensor sensitivity is 101.94 kHz/°C. MDPI 2018-01-16 /pmc/articles/PMC5795512/ /pubmed/29337879 http://dx.doi.org/10.3390/s18010242 Text en © 2018 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Lu, Fei
Wang, Haixing
Guo, Yanjie
Tan, Qiulin
Zhang, Wendong
Xiong, Jijun
Microwave Backscatter-Based Wireless Temperature Sensor Fabricated by an Alumina-Backed Au Slot Radiation Patch
title Microwave Backscatter-Based Wireless Temperature Sensor Fabricated by an Alumina-Backed Au Slot Radiation Patch
title_full Microwave Backscatter-Based Wireless Temperature Sensor Fabricated by an Alumina-Backed Au Slot Radiation Patch
title_fullStr Microwave Backscatter-Based Wireless Temperature Sensor Fabricated by an Alumina-Backed Au Slot Radiation Patch
title_full_unstemmed Microwave Backscatter-Based Wireless Temperature Sensor Fabricated by an Alumina-Backed Au Slot Radiation Patch
title_short Microwave Backscatter-Based Wireless Temperature Sensor Fabricated by an Alumina-Backed Au Slot Radiation Patch
title_sort microwave backscatter-based wireless temperature sensor fabricated by an alumina-backed au slot radiation patch
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5795512/
https://www.ncbi.nlm.nih.gov/pubmed/29337879
http://dx.doi.org/10.3390/s18010242
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