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Optimization of Gas Composition Used in Plasma Chemical Vaporization Machining for Figuring of Reaction-Sintered Silicon Carbide with Low Surface Roughness
In recent years, reaction-sintered silicon carbide (RS-SiC) has been of interest in many engineering fields because of its excellent properties, such as its light weight, high rigidity, high heat conductance and low coefficient of thermal expansion. However, RS-SiC is difficult to machine owing to i...
Autores principales: | Sun, Rongyan, Yang, Xu, Ohkubo, Yuji, Endo, Katsuyoshi, Yamamura, Kazuya |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5799173/ https://www.ncbi.nlm.nih.gov/pubmed/29402967 http://dx.doi.org/10.1038/s41598-018-20849-5 |
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