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Mesoscopic physical removal of material using sliding nano-diamond contacts

Wear mechanisms including fracture and plastic deformation at the nanoscale are central to understand sliding contacts. Recently, the combination of tip-induced material erosion with the sensing capability of secondary imaging modes of AFM, has enabled a slice-and-view tomographic technique named AF...

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Autores principales: Celano, Umberto, Hsia, Feng-Chun, Vanhaeren, Danielle, Paredis, Kristof, Nordling, Torbjörn E. M., Buijnsters, Josephus G., Hantschel, Thomas, Vandervorst, Wilfried
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5813091/
https://www.ncbi.nlm.nih.gov/pubmed/29445103
http://dx.doi.org/10.1038/s41598-018-21171-w
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author Celano, Umberto
Hsia, Feng-Chun
Vanhaeren, Danielle
Paredis, Kristof
Nordling, Torbjörn E. M.
Buijnsters, Josephus G.
Hantschel, Thomas
Vandervorst, Wilfried
author_facet Celano, Umberto
Hsia, Feng-Chun
Vanhaeren, Danielle
Paredis, Kristof
Nordling, Torbjörn E. M.
Buijnsters, Josephus G.
Hantschel, Thomas
Vandervorst, Wilfried
author_sort Celano, Umberto
collection PubMed
description Wear mechanisms including fracture and plastic deformation at the nanoscale are central to understand sliding contacts. Recently, the combination of tip-induced material erosion with the sensing capability of secondary imaging modes of AFM, has enabled a slice-and-view tomographic technique named AFM tomography or Scalpel SPM. However, the elusive laws governing nanoscale wear and the large quantity of atoms involved in the tip-sample contact, require a dedicated mesoscale description to understand and model the tip-induced material removal. Here, we study nanosized sliding contacts made of diamond in the regime whereby thousands of nm(3) are removed. We explore the fundamentals of high-pressure tip-induced material removal for various materials. Changes in the load force are systematically combined with AFM and SEM to increase the understanding and the process controllability. The nonlinear variation of the removal rate with the load force is interpreted as a combination of two contact regimes each dominating in a particular force range. By using the gradual transition between the two regimes, (1) the experimental rate of material eroded on each tip passage is modeled, (2) a controllable removal rate below 5 nm/scan for all the materials is demonstrated, thus opening to future development of 3D tomographic AFM.
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spelling pubmed-58130912018-02-21 Mesoscopic physical removal of material using sliding nano-diamond contacts Celano, Umberto Hsia, Feng-Chun Vanhaeren, Danielle Paredis, Kristof Nordling, Torbjörn E. M. Buijnsters, Josephus G. Hantschel, Thomas Vandervorst, Wilfried Sci Rep Article Wear mechanisms including fracture and plastic deformation at the nanoscale are central to understand sliding contacts. Recently, the combination of tip-induced material erosion with the sensing capability of secondary imaging modes of AFM, has enabled a slice-and-view tomographic technique named AFM tomography or Scalpel SPM. However, the elusive laws governing nanoscale wear and the large quantity of atoms involved in the tip-sample contact, require a dedicated mesoscale description to understand and model the tip-induced material removal. Here, we study nanosized sliding contacts made of diamond in the regime whereby thousands of nm(3) are removed. We explore the fundamentals of high-pressure tip-induced material removal for various materials. Changes in the load force are systematically combined with AFM and SEM to increase the understanding and the process controllability. The nonlinear variation of the removal rate with the load force is interpreted as a combination of two contact regimes each dominating in a particular force range. By using the gradual transition between the two regimes, (1) the experimental rate of material eroded on each tip passage is modeled, (2) a controllable removal rate below 5 nm/scan for all the materials is demonstrated, thus opening to future development of 3D tomographic AFM. Nature Publishing Group UK 2018-02-14 /pmc/articles/PMC5813091/ /pubmed/29445103 http://dx.doi.org/10.1038/s41598-018-21171-w Text en © The Author(s) 2018 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.
spellingShingle Article
Celano, Umberto
Hsia, Feng-Chun
Vanhaeren, Danielle
Paredis, Kristof
Nordling, Torbjörn E. M.
Buijnsters, Josephus G.
Hantschel, Thomas
Vandervorst, Wilfried
Mesoscopic physical removal of material using sliding nano-diamond contacts
title Mesoscopic physical removal of material using sliding nano-diamond contacts
title_full Mesoscopic physical removal of material using sliding nano-diamond contacts
title_fullStr Mesoscopic physical removal of material using sliding nano-diamond contacts
title_full_unstemmed Mesoscopic physical removal of material using sliding nano-diamond contacts
title_short Mesoscopic physical removal of material using sliding nano-diamond contacts
title_sort mesoscopic physical removal of material using sliding nano-diamond contacts
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5813091/
https://www.ncbi.nlm.nih.gov/pubmed/29445103
http://dx.doi.org/10.1038/s41598-018-21171-w
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