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Large anisotropy of ferroelectric and pyroelectric properties in heteroepitaxial oxide layers
Epitaxial PbZr(0.52)Ti(0.48)O(3) (PZT) layers were integrated on Si(001) with single PZT {001} orientation, mosaïcity below 1° and a majority of a-oriented ferroelectric domains (∼65%). Ferroelectric and pyroelectric properties are determined along both the out-of-plane and in-plane directions throu...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5847548/ https://www.ncbi.nlm.nih.gov/pubmed/29531229 http://dx.doi.org/10.1038/s41598-018-22349-y |
Sumario: | Epitaxial PbZr(0.52)Ti(0.48)O(3) (PZT) layers were integrated on Si(001) with single PZT {001} orientation, mosaïcity below 1° and a majority of a-oriented ferroelectric domains (∼65%). Ferroelectric and pyroelectric properties are determined along both the out-of-plane and in-plane directions through parallel-plate capacitor and coplanar interdigital capacitor along the <100>(PZT) direction. A large anisotropy in these properties is observed. The in-plane remnant polarization (21.5 µC.cm(−2)) is almost twice larger than that measured along the out-of-plane direction (13.5 µC.cm(−2)), in agreement with the domain orientation. Oppositely, the in-plane pyroelectric coefficient (−285 µC.m(−2).K(−1)) is much lower than that measured out-of-plane (−480 µC.m(−2).K(−1)). The pyroelectric anisotropy is explicated in term of degree of structural freedom with temperature. In particular, the low in-plane pyroelectric coefficient is explained by a two-dimensional clamping of the layers on the substrate which induces tensile stress (from thermal expansion), competing with the decreasing tetragonality of a-domains (shortening of the polar c-axis lattice parameter). Temperature-dependent XRD measurements have revealed an increased fraction of a-domains with temperature, attesting the occurrence of a partial two-dimensional clamping. These observed properties are of critical importance for integrated pyroelectric devices. |
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