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Towards the third dimension in direct electron beam writing of silver

Carboxylates constitute an extremely promising class of precursor compounds for the electron beam induced deposition of silver. In this work both silver 2,2-dimethylbutyrate and silver pentafluoropropionate were investigated with respect to their dwell-time-dependent deposition behavior and growth c...

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Detalles Bibliográficos
Autores principales:	Höflich, Katja, Jurczyk, Jakub Mateusz, Madajska, Katarzyna, Götz, Maximilian, Berger, Luisa, Guerra-Nuñez, Carlos, Haverkamp, Caspar, Szymanska, Iwona, Utke, Ivo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Beilstein-Institut 2018
Materias:	Letter
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5852464/ https://www.ncbi.nlm.nih.gov/pubmed/29600145 http://dx.doi.org/10.3762/bjnano.9.78

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