Fabrications and Performance of Wireless LC Pressure Sensors through LTCC Technology

This paper presents a kind of passive wireless pressure sensor comprised of a planar spiral inductor and a cavity parallel plate capacitor fabricated through low-temperature co-fired ceramic (LTCC) technology. The LTCC material with a low Young’s modulus of ~65 GPa prepared by our laboratory was use...

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Detalles Bibliográficos
Autores principales: Lin, Lin, Ma, Mingsheng, Zhang, Faqiang, Liu, Feng, Liu, Zhifu, Li, Yongxiang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5855218/
https://www.ncbi.nlm.nih.gov/pubmed/29370099
http://dx.doi.org/10.3390/s18020340

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5855218/
https://www.ncbi.nlm.nih.gov/pubmed/29370099
http://dx.doi.org/10.3390/s18020340

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