Cargando…
A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0(∘) to 360(∘) †
In this paper, a novel single-axis MEMS tilt sensor is presented. It contains a hexagonal proof mass, six micro-lever force amplifiers and three double-ended-tuning fork (DETF) resonant strain gauges. The proof mass is placed in the center with the micro-levers and the DETFs radially arrayed around....
Autores principales: | , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2018
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5855509/ https://www.ncbi.nlm.nih.gov/pubmed/29370140 http://dx.doi.org/10.3390/s18020346 |
_version_ | 1783307113412427776 |
---|---|
author | Wang, Shudong Wei, Xueyong Weng, Yinsheng Zhao, Yulong Jiang, Zhuangde |
author_facet | Wang, Shudong Wei, Xueyong Weng, Yinsheng Zhao, Yulong Jiang, Zhuangde |
author_sort | Wang, Shudong |
collection | PubMed |
description | In this paper, a novel single-axis MEMS tilt sensor is presented. It contains a hexagonal proof mass, six micro-lever force amplifiers and three double-ended-tuning fork (DETF) resonant strain gauges. The proof mass is placed in the center with the micro-levers and the DETFs radially arrayed around. The variation of gravity acceleration applied on the proof mass will result in frequency shifts of the DETFs. Angular tilt can be got by analyzing the frequency outputs. The structural design of the tilt sensor is optimized by finite element simulation and the device is microfabricated using a silicon-on-insulator process, followed by open-loop and closed-loop characterizations. Results show that the scale factor of such sensor is at least 11.53 Hz/degree. Minimum Allan deviation of the DETF oscillator is 220 ppb (parts per billion) of the resonant frequency for an 5 s integration time. Resolution of the tilt sensor is [Formula: see text] in the whole measurement range from [Formula: see text] to [Formula: see text]. |
format | Online Article Text |
id | pubmed-5855509 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2018 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-58555092018-03-20 A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0(∘) to 360(∘) † Wang, Shudong Wei, Xueyong Weng, Yinsheng Zhao, Yulong Jiang, Zhuangde Sensors (Basel) Article In this paper, a novel single-axis MEMS tilt sensor is presented. It contains a hexagonal proof mass, six micro-lever force amplifiers and three double-ended-tuning fork (DETF) resonant strain gauges. The proof mass is placed in the center with the micro-levers and the DETFs radially arrayed around. The variation of gravity acceleration applied on the proof mass will result in frequency shifts of the DETFs. Angular tilt can be got by analyzing the frequency outputs. The structural design of the tilt sensor is optimized by finite element simulation and the device is microfabricated using a silicon-on-insulator process, followed by open-loop and closed-loop characterizations. Results show that the scale factor of such sensor is at least 11.53 Hz/degree. Minimum Allan deviation of the DETF oscillator is 220 ppb (parts per billion) of the resonant frequency for an 5 s integration time. Resolution of the tilt sensor is [Formula: see text] in the whole measurement range from [Formula: see text] to [Formula: see text]. MDPI 2018-01-25 /pmc/articles/PMC5855509/ /pubmed/29370140 http://dx.doi.org/10.3390/s18020346 Text en © 2018 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Wang, Shudong Wei, Xueyong Weng, Yinsheng Zhao, Yulong Jiang, Zhuangde A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0(∘) to 360(∘) † |
title | A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0(∘) to 360(∘)
† |
title_full | A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0(∘) to 360(∘)
† |
title_fullStr | A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0(∘) to 360(∘)
† |
title_full_unstemmed | A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0(∘) to 360(∘)
† |
title_short | A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0(∘) to 360(∘)
† |
title_sort | novel single-axis mems tilt sensor with a high sensitivity in the measurement range from 0(∘) to 360(∘)
† |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5855509/ https://www.ncbi.nlm.nih.gov/pubmed/29370140 http://dx.doi.org/10.3390/s18020346 |
work_keys_str_mv | AT wangshudong anovelsingleaxismemstiltsensorwithahighsensitivityinthemeasurementrangefrom0to360 AT weixueyong anovelsingleaxismemstiltsensorwithahighsensitivityinthemeasurementrangefrom0to360 AT wengyinsheng anovelsingleaxismemstiltsensorwithahighsensitivityinthemeasurementrangefrom0to360 AT zhaoyulong anovelsingleaxismemstiltsensorwithahighsensitivityinthemeasurementrangefrom0to360 AT jiangzhuangde anovelsingleaxismemstiltsensorwithahighsensitivityinthemeasurementrangefrom0to360 AT wangshudong novelsingleaxismemstiltsensorwithahighsensitivityinthemeasurementrangefrom0to360 AT weixueyong novelsingleaxismemstiltsensorwithahighsensitivityinthemeasurementrangefrom0to360 AT wengyinsheng novelsingleaxismemstiltsensorwithahighsensitivityinthemeasurementrangefrom0to360 AT zhaoyulong novelsingleaxismemstiltsensorwithahighsensitivityinthemeasurementrangefrom0to360 AT jiangzhuangde novelsingleaxismemstiltsensorwithahighsensitivityinthemeasurementrangefrom0to360 |