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A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0(∘) to 360(∘) †

In this paper, a novel single-axis MEMS tilt sensor is presented. It contains a hexagonal proof mass, six micro-lever force amplifiers and three double-ended-tuning fork (DETF) resonant strain gauges. The proof mass is placed in the center with the micro-levers and the DETFs radially arrayed around....

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Detalles Bibliográficos
Autores principales: Wang, Shudong, Wei, Xueyong, Weng, Yinsheng, Zhao, Yulong, Jiang, Zhuangde
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5855509/
https://www.ncbi.nlm.nih.gov/pubmed/29370140
http://dx.doi.org/10.3390/s18020346
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author Wang, Shudong
Wei, Xueyong
Weng, Yinsheng
Zhao, Yulong
Jiang, Zhuangde
author_facet Wang, Shudong
Wei, Xueyong
Weng, Yinsheng
Zhao, Yulong
Jiang, Zhuangde
author_sort Wang, Shudong
collection PubMed
description In this paper, a novel single-axis MEMS tilt sensor is presented. It contains a hexagonal proof mass, six micro-lever force amplifiers and three double-ended-tuning fork (DETF) resonant strain gauges. The proof mass is placed in the center with the micro-levers and the DETFs radially arrayed around. The variation of gravity acceleration applied on the proof mass will result in frequency shifts of the DETFs. Angular tilt can be got by analyzing the frequency outputs. The structural design of the tilt sensor is optimized by finite element simulation and the device is microfabricated using a silicon-on-insulator process, followed by open-loop and closed-loop characterizations. Results show that the scale factor of such sensor is at least 11.53 Hz/degree. Minimum Allan deviation of the DETF oscillator is 220 ppb (parts per billion) of the resonant frequency for an 5 s integration time. Resolution of the tilt sensor is [Formula: see text] in the whole measurement range from [Formula: see text] to [Formula: see text].
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spelling pubmed-58555092018-03-20 A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0(∘) to 360(∘) † Wang, Shudong Wei, Xueyong Weng, Yinsheng Zhao, Yulong Jiang, Zhuangde Sensors (Basel) Article In this paper, a novel single-axis MEMS tilt sensor is presented. It contains a hexagonal proof mass, six micro-lever force amplifiers and three double-ended-tuning fork (DETF) resonant strain gauges. The proof mass is placed in the center with the micro-levers and the DETFs radially arrayed around. The variation of gravity acceleration applied on the proof mass will result in frequency shifts of the DETFs. Angular tilt can be got by analyzing the frequency outputs. The structural design of the tilt sensor is optimized by finite element simulation and the device is microfabricated using a silicon-on-insulator process, followed by open-loop and closed-loop characterizations. Results show that the scale factor of such sensor is at least 11.53 Hz/degree. Minimum Allan deviation of the DETF oscillator is 220 ppb (parts per billion) of the resonant frequency for an 5 s integration time. Resolution of the tilt sensor is [Formula: see text] in the whole measurement range from [Formula: see text] to [Formula: see text]. MDPI 2018-01-25 /pmc/articles/PMC5855509/ /pubmed/29370140 http://dx.doi.org/10.3390/s18020346 Text en © 2018 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Wang, Shudong
Wei, Xueyong
Weng, Yinsheng
Zhao, Yulong
Jiang, Zhuangde
A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0(∘) to 360(∘) †
title A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0(∘) to 360(∘) †
title_full A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0(∘) to 360(∘) †
title_fullStr A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0(∘) to 360(∘) †
title_full_unstemmed A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0(∘) to 360(∘) †
title_short A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0(∘) to 360(∘) †
title_sort novel single-axis mems tilt sensor with a high sensitivity in the measurement range from 0(∘) to 360(∘) †
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5855509/
https://www.ncbi.nlm.nih.gov/pubmed/29370140
http://dx.doi.org/10.3390/s18020346
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