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A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0(∘) to 360(∘) †
In this paper, a novel single-axis MEMS tilt sensor is presented. It contains a hexagonal proof mass, six micro-lever force amplifiers and three double-ended-tuning fork (DETF) resonant strain gauges. The proof mass is placed in the center with the micro-levers and the DETFs radially arrayed around....
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5855509/ https://www.ncbi.nlm.nih.gov/pubmed/29370140 http://dx.doi.org/10.3390/s18020346 |