Second Generation Small Pixel Technology Using Hybrid Bond Stacking †

In this work, OmniVision’s second generation (Gen2) of small-pixel BSI stacking technologies is reviewed. The key features of this technology are hybrid-bond stacking, deeper back-side, deep-trench isolation, new back-side composite metal-oxide grid, and improved gate oxide quality. This Gen2 techno...

Descripción completa

Detalles Bibliográficos
Autores principales: Venezia, Vincent C., Hsiung, Alan Chih-Wei, Yang, Wu-Zang, Zhang, Yuying, Zhao, Cheng, Lin, Zhiqiang, Grant, Lindsay A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5855510/
https://www.ncbi.nlm.nih.gov/pubmed/29495272
http://dx.doi.org/10.3390/s18020667
_version_ 1783307113643114496
author Venezia, Vincent C.
Hsiung, Alan Chih-Wei
Yang, Wu-Zang
Zhang, Yuying
Zhao, Cheng
Lin, Zhiqiang
Grant, Lindsay A.
author_facet Venezia, Vincent C.
Hsiung, Alan Chih-Wei
Yang, Wu-Zang
Zhang, Yuying
Zhao, Cheng
Lin, Zhiqiang
Grant, Lindsay A.
author_sort Venezia, Vincent C.
collection PubMed
description In this work, OmniVision’s second generation (Gen2) of small-pixel BSI stacking technologies is reviewed. The key features of this technology are hybrid-bond stacking, deeper back-side, deep-trench isolation, new back-side composite metal-oxide grid, and improved gate oxide quality. This Gen2 technology achieves state-of-the-art low-light image-sensor performance for 1.1, 1.0, and 0.9 µm pixel products. Additional improvements on this technology include less than 100 ppm white-pixel process and a high near-infrared (NIR) QE technology.
format Online
Article
Text
id pubmed-5855510
institution National Center for Biotechnology Information
language English
publishDate 2018
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-58555102018-03-20 Second Generation Small Pixel Technology Using Hybrid Bond Stacking † Venezia, Vincent C. Hsiung, Alan Chih-Wei Yang, Wu-Zang Zhang, Yuying Zhao, Cheng Lin, Zhiqiang Grant, Lindsay A. Sensors (Basel) Article In this work, OmniVision’s second generation (Gen2) of small-pixel BSI stacking technologies is reviewed. The key features of this technology are hybrid-bond stacking, deeper back-side, deep-trench isolation, new back-side composite metal-oxide grid, and improved gate oxide quality. This Gen2 technology achieves state-of-the-art low-light image-sensor performance for 1.1, 1.0, and 0.9 µm pixel products. Additional improvements on this technology include less than 100 ppm white-pixel process and a high near-infrared (NIR) QE technology. MDPI 2018-02-24 /pmc/articles/PMC5855510/ /pubmed/29495272 http://dx.doi.org/10.3390/s18020667 Text en © 2018 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Venezia, Vincent C.
Hsiung, Alan Chih-Wei
Yang, Wu-Zang
Zhang, Yuying
Zhao, Cheng
Lin, Zhiqiang
Grant, Lindsay A.
Second Generation Small Pixel Technology Using Hybrid Bond Stacking †
title Second Generation Small Pixel Technology Using Hybrid Bond Stacking †
title_full Second Generation Small Pixel Technology Using Hybrid Bond Stacking †
title_fullStr Second Generation Small Pixel Technology Using Hybrid Bond Stacking †
title_full_unstemmed Second Generation Small Pixel Technology Using Hybrid Bond Stacking †
title_short Second Generation Small Pixel Technology Using Hybrid Bond Stacking †
title_sort second generation small pixel technology using hybrid bond stacking †
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5855510/
https://www.ncbi.nlm.nih.gov/pubmed/29495272
http://dx.doi.org/10.3390/s18020667
work_keys_str_mv AT veneziavincentc secondgenerationsmallpixeltechnologyusinghybridbondstacking
AT hsiungalanchihwei secondgenerationsmallpixeltechnologyusinghybridbondstacking
AT yangwuzang secondgenerationsmallpixeltechnologyusinghybridbondstacking
AT zhangyuying secondgenerationsmallpixeltechnologyusinghybridbondstacking
AT zhaocheng secondgenerationsmallpixeltechnologyusinghybridbondstacking
AT linzhiqiang secondgenerationsmallpixeltechnologyusinghybridbondstacking
AT grantlindsaya secondgenerationsmallpixeltechnologyusinghybridbondstacking

Ejemplares similares