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A Real-Time Thermal Self-Elimination Method for Static Mode Operated Freestanding Piezoresistive Microcantilever-Based Biosensors

Here, we provide a method and apparatus for real-time compensation of the thermal effect of single free-standing piezoresistive microcantilever-based biosensors. The sensor chip contained an on-chip fixed piezoresistor that served as a temperature sensor, and a multilayer microcantilever with an emb...

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Detalles Bibliográficos
Autores principales:	Ku, Yu-Fu, Huang, Long-Sun, Yen, Yi-Kuang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5872066/ https://www.ncbi.nlm.nih.gov/pubmed/29495574 http://dx.doi.org/10.3390/bios8010018

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