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Nonlinear Errors Resulting from Ghost Reflection and Its Coupling with Optical Mixing in Heterodyne Laser Interferometers

Even after the Heydemann correction, residual nonlinear errors, ranging from hundreds of picometers to several nanometers, are still found in heterodyne laser interferometers. This is a crucial factor impeding the realization of picometer level metrology, but its source and mechanism have barely bee...

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Autores principales: Fu, Haijin, Wang, Yue, Hu, Pengcheng, Tan, Jiubin, Fan, Zhigang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5877298/
https://www.ncbi.nlm.nih.gov/pubmed/29498685
http://dx.doi.org/10.3390/s18030758
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author Fu, Haijin
Wang, Yue
Hu, Pengcheng
Tan, Jiubin
Fan, Zhigang
author_facet Fu, Haijin
Wang, Yue
Hu, Pengcheng
Tan, Jiubin
Fan, Zhigang
author_sort Fu, Haijin
collection PubMed
description Even after the Heydemann correction, residual nonlinear errors, ranging from hundreds of picometers to several nanometers, are still found in heterodyne laser interferometers. This is a crucial factor impeding the realization of picometer level metrology, but its source and mechanism have barely been investigated. To study this problem, a novel nonlinear model based on optical mixing and coupling with ghost reflection is proposed and then verified by experiments. After intense investigation of this new model’s influence, results indicate that new additional high-order and negative-order nonlinear harmonics, arising from ghost reflection and its coupling with optical mixing, have only a negligible contribution to the overall nonlinear error. In real applications, any effect on the Lissajous trajectory might be invisible due to the small ghost reflectance. However, even a tiny ghost reflection can significantly worsen the effectiveness of the Heydemann correction, or even make this correction completely ineffective, i.e., compensation makes the error larger rather than smaller. Moreover, the residual nonlinear error after correction is dominated only by ghost reflectance.
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spelling pubmed-58772982018-04-09 Nonlinear Errors Resulting from Ghost Reflection and Its Coupling with Optical Mixing in Heterodyne Laser Interferometers Fu, Haijin Wang, Yue Hu, Pengcheng Tan, Jiubin Fan, Zhigang Sensors (Basel) Article Even after the Heydemann correction, residual nonlinear errors, ranging from hundreds of picometers to several nanometers, are still found in heterodyne laser interferometers. This is a crucial factor impeding the realization of picometer level metrology, but its source and mechanism have barely been investigated. To study this problem, a novel nonlinear model based on optical mixing and coupling with ghost reflection is proposed and then verified by experiments. After intense investigation of this new model’s influence, results indicate that new additional high-order and negative-order nonlinear harmonics, arising from ghost reflection and its coupling with optical mixing, have only a negligible contribution to the overall nonlinear error. In real applications, any effect on the Lissajous trajectory might be invisible due to the small ghost reflectance. However, even a tiny ghost reflection can significantly worsen the effectiveness of the Heydemann correction, or even make this correction completely ineffective, i.e., compensation makes the error larger rather than smaller. Moreover, the residual nonlinear error after correction is dominated only by ghost reflectance. MDPI 2018-03-02 /pmc/articles/PMC5877298/ /pubmed/29498685 http://dx.doi.org/10.3390/s18030758 Text en © 2018 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Fu, Haijin
Wang, Yue
Hu, Pengcheng
Tan, Jiubin
Fan, Zhigang
Nonlinear Errors Resulting from Ghost Reflection and Its Coupling with Optical Mixing in Heterodyne Laser Interferometers
title Nonlinear Errors Resulting from Ghost Reflection and Its Coupling with Optical Mixing in Heterodyne Laser Interferometers
title_full Nonlinear Errors Resulting from Ghost Reflection and Its Coupling with Optical Mixing in Heterodyne Laser Interferometers
title_fullStr Nonlinear Errors Resulting from Ghost Reflection and Its Coupling with Optical Mixing in Heterodyne Laser Interferometers
title_full_unstemmed Nonlinear Errors Resulting from Ghost Reflection and Its Coupling with Optical Mixing in Heterodyne Laser Interferometers
title_short Nonlinear Errors Resulting from Ghost Reflection and Its Coupling with Optical Mixing in Heterodyne Laser Interferometers
title_sort nonlinear errors resulting from ghost reflection and its coupling with optical mixing in heterodyne laser interferometers
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5877298/
https://www.ncbi.nlm.nih.gov/pubmed/29498685
http://dx.doi.org/10.3390/s18030758
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