Nonlinear Errors Resulting from Ghost Reflection and Its Coupling with Optical Mixing in Heterodyne Laser Interferometers

Even after the Heydemann correction, residual nonlinear errors, ranging from hundreds of picometers to several nanometers, are still found in heterodyne laser interferometers. This is a crucial factor impeding the realization of picometer level metrology, but its source and mechanism have barely bee...

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Detalles Bibliográficos
Autores principales: Fu, Haijin, Wang, Yue, Hu, Pengcheng, Tan, Jiubin, Fan, Zhigang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5877298/
https://www.ncbi.nlm.nih.gov/pubmed/29498685
http://dx.doi.org/10.3390/s18030758

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5877298/
https://www.ncbi.nlm.nih.gov/pubmed/29498685
http://dx.doi.org/10.3390/s18030758

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