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Nonlinear Errors Resulting from Ghost Reflection and Its Coupling with Optical Mixing in Heterodyne Laser Interferometers
Even after the Heydemann correction, residual nonlinear errors, ranging from hundreds of picometers to several nanometers, are still found in heterodyne laser interferometers. This is a crucial factor impeding the realization of picometer level metrology, but its source and mechanism have barely bee...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5877298/ https://www.ncbi.nlm.nih.gov/pubmed/29498685 http://dx.doi.org/10.3390/s18030758 |