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Growth mechanism of epitaxial YSZ on Si by Pulsed Laser Deposition
The epitaxial growth of yttria-stabilized zirconia (YSZ) on silicon with native oxide was investigated in order to gain more insight in the growth mechanism. Specifically, attention was paid to the possibilities to control the chemical interactions between YSZ, silicon and oxygen during initial grow...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2018
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5893595/ https://www.ncbi.nlm.nih.gov/pubmed/29636484 http://dx.doi.org/10.1038/s41598-018-24025-7 |