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Growth mechanism of epitaxial YSZ on Si by Pulsed Laser Deposition

The epitaxial growth of yttria-stabilized zirconia (YSZ) on silicon with native oxide was investigated in order to gain more insight in the growth mechanism. Specifically, attention was paid to the possibilities to control the chemical interactions between YSZ, silicon and oxygen during initial grow...

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Detalles Bibliográficos
Autores principales: Dubbink, David, Koster, Gertjan, Rijnders, Guus
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5893595/
https://www.ncbi.nlm.nih.gov/pubmed/29636484
http://dx.doi.org/10.1038/s41598-018-24025-7

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