Thickness-dependent Magnetic and Microwave Resonance Characterization of Combined Stripe Patterned FeCoBSi Films

In this paper, we fabricated a series of FeCoBSi multistoried patterned magnetic films with different thickness by traditional UV lithography method and DC sputtering deposition. Broad resonance band phenomenon was observed during high frequency property characterization, with full width half maximum (FWHM) of 4 GHz when the film thickness is 45 nm. The broad resonance band effect was contributed to the existence of multiple resonance peaks due to different stripe width of the combined stripe pattern, which induced distinguish shape anisotropic field in each stripe. Each resonance peak was independent due to the gap between the stripes, leading to a controllable method to tune the microwave properties of such structure. With thickness varied, the resonance band could be altered according to the mathematic prediction. This work presents an effective method for tuning the microwave resonance characterization in magnetization dynamic.