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Super-resolution for asymmetric resolution of FIB-SEM 3D imaging using AI with deep learning
Scanning electron microscopy equipped with a focused ion beam (FIB-SEM) is a promising three-dimensional (3D) imaging technique for nano- and meso-scale morphologies. In FIB-SEM, the specimen surface is stripped by an ion beam and imaged by an SEM installed orthogonally to the FIB. The lateral resol...
Autores principales: | Hagita, Katsumi, Higuchi, Takeshi, Jinnai, Hiroshi |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5897388/ https://www.ncbi.nlm.nih.gov/pubmed/29651011 http://dx.doi.org/10.1038/s41598-018-24330-1 |
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