Hybrid cluster precursors of the LaZrO insulator for transistors: lowering the processing temperature

Solution processing of ternary and multinary amorphous metal oxide insulators at processing temperatures below 250 °C remains challenging. Here, we report that the synthesis of a hybrid cluster structure, where the metal oxide core is coordinated by ligands and the different metal elements are incor...

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Detalles Bibliográficos
Autores principales: Zhu, Peixin, Li, Jinwang, Tue, Phan Trong, Inoue, Satoshi, Shimoda, Tatsuya
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5897419/
https://www.ncbi.nlm.nih.gov/pubmed/29651008
http://dx.doi.org/10.1038/s41598-018-24292-4

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5897419/
https://www.ncbi.nlm.nih.gov/pubmed/29651008
http://dx.doi.org/10.1038/s41598-018-24292-4

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