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Hybrid cluster precursors of the LaZrO insulator for transistors: lowering the processing temperature
Solution processing of ternary and multinary amorphous metal oxide insulators at processing temperatures below 250 °C remains challenging. Here, we report that the synthesis of a hybrid cluster structure, where the metal oxide core is coordinated by ligands and the different metal elements are incor...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5897419/ https://www.ncbi.nlm.nih.gov/pubmed/29651008 http://dx.doi.org/10.1038/s41598-018-24292-4 |