Metal (Ag/Ti)-Containing Hydrogenated Amorphous Carbon Nanocomposite Films with Enhanced Nanoscratch Resistance: Hybrid PECVD/PVD System and Microstructural Characteristics

This study aimed to develop hydrogenated amorphous carbon thin films with embedded metallic nanoparticles (a–C:H:Me) of controlled size and concentration. Towards this end, a novel hybrid deposition system is presented that uses a combination of Plasma Enhanced Chemical Vapor Deposition (PECVD) and...

Descripción completa

Detalles Bibliográficos
Autores principales: Constantinou, Marios, Nikolaou, Petros, Koutsokeras, Loukas, Avgeropoulos, Apostolos, Moschovas, Dimitrios, Varotsis, Constantinos, Patsalas, Panos, Kelires, Pantelis, Constantinides, Georgios
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5923539/
https://www.ncbi.nlm.nih.gov/pubmed/29601507
http://dx.doi.org/10.3390/nano8040209

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5923539/
https://www.ncbi.nlm.nih.gov/pubmed/29601507
http://dx.doi.org/10.3390/nano8040209

Ejemplares similares