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PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes
With an aim to reduce the cost of prototype development, this paper establishes a PSPICE hybrid model for the simulation of capacitive microelectromechanical systems (MEMS) gyroscopes. This is achieved by modeling gyroscopes in different modules, then connecting them in accordance with the correspon...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5948506/ https://www.ncbi.nlm.nih.gov/pubmed/29597284 http://dx.doi.org/10.3390/s18041006 |