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A Flexible Sensing Unit Manufacturing Method of Electrochemical Seismic Sensor

This paper presents an electrochemical seismic sensor in which paraylene was used as a substrate and insulating layer of micro-fabricated electrodes, enabling the detection of seismic signals with enhanced sensitivities in comparison to silicon-based counterparts. Based on microfabrication, paralene...

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Detalles Bibliográficos
Autores principales:	Li, Guanglei, Sun, Zhenyuan, Wang, Junbo, Chen, Deyong, Chen, Jian, Chen, Lianhong, Xu, Chao, Qi, Wenjie, Zheng, Yu
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5948934/ https://www.ncbi.nlm.nih.gov/pubmed/29641455 http://dx.doi.org/10.3390/s18041165

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