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Terahertz-driven polymerization of resists in nanoantennas
Plasmon-mediated polymerization has been intensively studied for various applications including nanolithography, near-field mapping, and selective functionalization. However, these studies have been limited from the near-infrared to the ultraviolet regime. Here, we report a resist polymerization usi...
Autores principales: | Park, Woongkyu, Lee, Youjin, Kang, Taehee, Jeong, Jeeyoon, Kim, Dai-Sik |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5958088/ https://www.ncbi.nlm.nih.gov/pubmed/29773858 http://dx.doi.org/10.1038/s41598-018-26214-w |
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