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Suspended Carbon Nanotubes for Humidity Sensing
A room temperature microfabrication technique using SU8, an epoxy-based highly functional photoresist as a sacrificial layer, is developed to obtain suspended aligned carbon nanotube beams. The humidity-sensing characteristics of aligned suspended single-walled carbon nanotube films are studied. A c...
Autores principales: | Arunachalam, Shivaram, Gupta, Anubha A., Izquierdo, Ricardo, Nabki, Frederic |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5981667/ https://www.ncbi.nlm.nih.gov/pubmed/29786661 http://dx.doi.org/10.3390/s18051655 |
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