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Bimorph material/structure designs for high sensitivity flexible surface acoustic wave temperature sensors
A fundamental challenge for surface acoustic wave (SAW) temperature sensors is the detection of small temperature changes on non-planar, often curved, surfaces. In this work, we present a new design methodology for SAW devices based on flexible substrate and bimorph material/structures, which can ma...
Autores principales: | , , , , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5998018/ https://www.ncbi.nlm.nih.gov/pubmed/29899347 http://dx.doi.org/10.1038/s41598-018-27324-1 |
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author | Tao, R. Hasan, S. A. Wang, H. Z. Zhou, J. Luo, J. T. McHale, G. Gibson, D. Canyelles-Pericas, P. Cooke, M. D. Wood, D. Liu, Y. Wu, Q. Ng, W. P. Franke, T. Fu, Y. Q. |
author_facet | Tao, R. Hasan, S. A. Wang, H. Z. Zhou, J. Luo, J. T. McHale, G. Gibson, D. Canyelles-Pericas, P. Cooke, M. D. Wood, D. Liu, Y. Wu, Q. Ng, W. P. Franke, T. Fu, Y. Q. |
author_sort | Tao, R. |
collection | PubMed |
description | A fundamental challenge for surface acoustic wave (SAW) temperature sensors is the detection of small temperature changes on non-planar, often curved, surfaces. In this work, we present a new design methodology for SAW devices based on flexible substrate and bimorph material/structures, which can maximize the temperature coefficient of frequency (TCF). We performed finite element analysis simulations and obtained theoretical TCF values for SAW sensors made of ZnO thin films (~5 μm thick) coated aluminum (Al) foil and Al plate substrates with thicknesses varied from 1 to 1600 μm. Based on the simulation results, SAW devices with selected Al foil or plate thicknesses were fabricated. The experimentally measured TCF values were in excellent agreements with the simulation results. A normalized wavelength parameter (e.g., the ratio between wavelength and sample thickness, λ/h) was applied to successfully describe changes in the TCF values, and the TCF readings of the ZnO/Al SAW devices showed dramatic increases when the normalized wavelength λ/h was larger than 1. Using this design approach, we obtained the highest reported TCF value of −760 ppm/K for a SAW device made of ZnO thin film coated on Al foils (50 μm thick), thereby enabling low cost temperature sensor applications to be realized on flexible substrates. |
format | Online Article Text |
id | pubmed-5998018 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2018 |
publisher | Nature Publishing Group UK |
record_format | MEDLINE/PubMed |
spelling | pubmed-59980182018-06-21 Bimorph material/structure designs for high sensitivity flexible surface acoustic wave temperature sensors Tao, R. Hasan, S. A. Wang, H. Z. Zhou, J. Luo, J. T. McHale, G. Gibson, D. Canyelles-Pericas, P. Cooke, M. D. Wood, D. Liu, Y. Wu, Q. Ng, W. P. Franke, T. Fu, Y. Q. Sci Rep Article A fundamental challenge for surface acoustic wave (SAW) temperature sensors is the detection of small temperature changes on non-planar, often curved, surfaces. In this work, we present a new design methodology for SAW devices based on flexible substrate and bimorph material/structures, which can maximize the temperature coefficient of frequency (TCF). We performed finite element analysis simulations and obtained theoretical TCF values for SAW sensors made of ZnO thin films (~5 μm thick) coated aluminum (Al) foil and Al plate substrates with thicknesses varied from 1 to 1600 μm. Based on the simulation results, SAW devices with selected Al foil or plate thicknesses were fabricated. The experimentally measured TCF values were in excellent agreements with the simulation results. A normalized wavelength parameter (e.g., the ratio between wavelength and sample thickness, λ/h) was applied to successfully describe changes in the TCF values, and the TCF readings of the ZnO/Al SAW devices showed dramatic increases when the normalized wavelength λ/h was larger than 1. Using this design approach, we obtained the highest reported TCF value of −760 ppm/K for a SAW device made of ZnO thin film coated on Al foils (50 μm thick), thereby enabling low cost temperature sensor applications to be realized on flexible substrates. Nature Publishing Group UK 2018-06-13 /pmc/articles/PMC5998018/ /pubmed/29899347 http://dx.doi.org/10.1038/s41598-018-27324-1 Text en © The Author(s) 2018 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. |
spellingShingle | Article Tao, R. Hasan, S. A. Wang, H. Z. Zhou, J. Luo, J. T. McHale, G. Gibson, D. Canyelles-Pericas, P. Cooke, M. D. Wood, D. Liu, Y. Wu, Q. Ng, W. P. Franke, T. Fu, Y. Q. Bimorph material/structure designs for high sensitivity flexible surface acoustic wave temperature sensors |
title | Bimorph material/structure designs for high sensitivity flexible surface acoustic wave temperature sensors |
title_full | Bimorph material/structure designs for high sensitivity flexible surface acoustic wave temperature sensors |
title_fullStr | Bimorph material/structure designs for high sensitivity flexible surface acoustic wave temperature sensors |
title_full_unstemmed | Bimorph material/structure designs for high sensitivity flexible surface acoustic wave temperature sensors |
title_short | Bimorph material/structure designs for high sensitivity flexible surface acoustic wave temperature sensors |
title_sort | bimorph material/structure designs for high sensitivity flexible surface acoustic wave temperature sensors |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5998018/ https://www.ncbi.nlm.nih.gov/pubmed/29899347 http://dx.doi.org/10.1038/s41598-018-27324-1 |
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