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Bimorph material/structure designs for high sensitivity flexible surface acoustic wave temperature sensors
A fundamental challenge for surface acoustic wave (SAW) temperature sensors is the detection of small temperature changes on non-planar, often curved, surfaces. In this work, we present a new design methodology for SAW devices based on flexible substrate and bimorph material/structures, which can ma...
Autores principales: | , , , , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5998018/ https://www.ncbi.nlm.nih.gov/pubmed/29899347 http://dx.doi.org/10.1038/s41598-018-27324-1 |