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FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN/SiO(2)/Si Multilayer Structure

A Finite Element Method (FEM) simulation study is conducted, aiming to scrutinize the sensitivity of Sezawa wave mode in a multilayer AlN/SiO(2)/Si Surface Acoustic Wave (SAW) sensor to low concentrations of Volatile Organic Compounds (VOCs), that is, trichloromethane, trichloroethylene, carbon tetr...

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Detalles Bibliográficos
Autores principales:	Aslam, Muhammad Zubair, Jeoti, Varun, Karuppanan, Saravanan, Malik, Aamir Farooq, Iqbal, Asif
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6021955/ https://www.ncbi.nlm.nih.gov/pubmed/29882929 http://dx.doi.org/10.3390/s18061687

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