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Vibration-Induced Errors in MEMS Tuning Fork Gyroscopes with Imbalance

This paper discusses the vibration-induced error in non-ideal MEMS tuning fork gyroscopes (TFGs). Ideal TFGs which are thought to be immune to vibrations do not exist, and imbalance between two gyros of TFGs is an inevitable phenomenon. Three types of fabrication imperfections (i.e., stiffness imbal...

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Detalles Bibliográficos
Autores principales:	Fang, Xiang, Dong, Linxi, Zhao, Wen-Sheng, Yan, Haixia, Teh, Kwok Siong, Wang, Gaofeng
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6022183/ https://www.ncbi.nlm.nih.gov/pubmed/29844301 http://dx.doi.org/10.3390/s18061755

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