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Research on a Novel MEMS Sensor for Spatial DC Electric Field Measurements in an Ion Flows Field

Thus far, despite the development of electric field sensors (EFSs) such as field mills, optoelectronic EFSs and microelectromechanical system (MEMS)-based EFSs, no sensor can accurately measure an electric field in space due to the existence of space charge and the influence of charge attachment. To...

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Detalles Bibliográficos
Autores principales:	Mou, Ya, Yu, Zhanqing, Huang, Kaitian, Ma, Qing, Zeng, Rong, Wang, Zheyao
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6022208/ https://www.ncbi.nlm.nih.gov/pubmed/29843436 http://dx.doi.org/10.3390/s18061740

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