Control of the Nucleation Density of Molybdenum Disulfide in Large-Scale Synthesis Using Chemical Vapor Deposition

Atmospheric pressure chemical vapor deposition (CVD) is presently a promising approach for preparing two-dimensional (2D) MoS(2) crystals at high temperatures on SiO(2)/Si substrates. In this work, we propose an improved CVD method without hydrogen, which can increase formula flexibility by controlling the heating temperature of MoO(3) powder and sulfur powder. The results show that the size and coverage of MoS(2) domains vary largely, from discrete triangles to continuous film, on substrate. We find that the formation of MoS(2) domains is dependent on the nucleation density of MoS(2). Laminar flow theory is employed to elucidate the cause of the different shapes of MoS(2) domains. The distribution of carrier gas speeds at the substrate surface leads to a change of nucleation density and a variation of domain morphology. Thus, nucleation density and domain morphology can be actively controlled by adjusting the carrier gas flow rate in the experimental system. These results are of significance for understanding the growth regulation of 2D MoS(2) crystals.