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On the Use of Scalable NanoISFET Arrays of Silicon with Highly Reproducible Sensor Performance for Biosensor Applications
[Image: see text] As a prerequisite to the development of real label-free bioassay applications, a high-throughput top–down nanofabrication process is carried out with a combination of nanoimprint lithography, anisotropic wet-etching, and photolithography methods realizing nanoISFET arrays that are...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2016
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6044623/ https://www.ncbi.nlm.nih.gov/pubmed/30023473 http://dx.doi.org/10.1021/acsomega.6b00014 |