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Spatial separation effects in a guiding procedure in a modified ion-beam-sputtering process
In the present state of the art, ion beam sputtering is used to produce low-loss dielectric optics. During the manufacturing of a dielectric layer stack, the deposition material must be changed, which requires rapid mechanical movement of vacuum components. These mechanical components can be regarde...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group
2016
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6059896/ https://www.ncbi.nlm.nih.gov/pubmed/30167149 http://dx.doi.org/10.1038/lsa.2016.44 |