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Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs

Optical coupling between subwavelength grating pairs allows for the precise measurement of lateral or vertical displacement of grating elements and gives rise to different types of displacement and inertial sensors. In this paper, we demonstrate a design for a nano-optomechanical accelerometer based...

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Detalles Bibliográficos
Autores principales:	Lu, Qianbo, Bai, Jian, Wang, Kaiwei, Chen, Peiwen, Fang, Weidong, Wang, Chen
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6068687/ https://www.ncbi.nlm.nih.gov/pubmed/29949871 http://dx.doi.org/10.3390/s18072036

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