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High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors

The scale factor drifts and other long-term instability drifts of Micro-Electro-Mechanical System (MEMS) inertial sensors are the main contributors of the position and orientation errors in high dynamic environments. In this paper, a novel high dynamic micro vibrator, which could provide high accele...

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Detalles Bibliográficos
Autores principales:	Du, Yi-Jia, Yang, Ting-Ting, Gong, Dong-Dong, Wang, Yi-Cheng, Sun, Xiang-Yu, Qin, Feng, Dai, Gang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6068876/ https://www.ncbi.nlm.nih.gov/pubmed/29954126 http://dx.doi.org/10.3390/s18072055

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