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Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors

This paper proposes a decoupled six degrees of freedom (DOF) displacement measurement methodology, which is accomplished by utilizing six pairs of permanent magnets and six Hall sensors. Firstly, the coordinate transformation was mathematically derived, which represented the relationships between th...

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Detalles Bibliográficos
Autores principales:	Zhao, Bo, Shi, Weijia, Zhang, Jiawei, Zhang, Ming, Qi, Xue, Li, Jiaxin, Li, Feng, Tan, Jiubin
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6068923/ https://www.ncbi.nlm.nih.gov/pubmed/29941825 http://dx.doi.org/10.3390/s18072030

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