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Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode
This article presents an atomic force microscopy (AFM) technique for true three-dimensional (3D) characterization. The cantilever probe with flared tip was used in a home-made 3D-AFM system. The cantilever was driven by two shaking piezoceramics and oscillated around its vertical or torsional resona...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Hindawi
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6079385/ https://www.ncbi.nlm.nih.gov/pubmed/30116468 http://dx.doi.org/10.1155/2018/7606037 |
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author | Liu, Lu Xu, Jianguo Zhang, Rui Wu, Sen Hu, Xiaodong Hu, Xiaotang |
author_facet | Liu, Lu Xu, Jianguo Zhang, Rui Wu, Sen Hu, Xiaodong Hu, Xiaotang |
author_sort | Liu, Lu |
collection | PubMed |
description | This article presents an atomic force microscopy (AFM) technique for true three-dimensional (3D) characterization. The cantilever probe with flared tip was used in a home-made 3D-AFM system. The cantilever was driven by two shaking piezoceramics and oscillated around its vertical or torsional resonance frequency. The vertical resonance mode was used for upper surface imaging, and the torsional resonance mode was used for sidewall detecting. The 3D-AFM was applied to measure standard gratings with the height of 100 nm and 200 nm. The experiment results showed that the presented 3D-AFM technique was able to detect the small defect features on the steep sidewall and to reconstruct the 3D topography of the measured structure. |
format | Online Article Text |
id | pubmed-6079385 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2018 |
publisher | Hindawi |
record_format | MEDLINE/PubMed |
spelling | pubmed-60793852018-08-16 Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode Liu, Lu Xu, Jianguo Zhang, Rui Wu, Sen Hu, Xiaodong Hu, Xiaotang Scanning Research Article This article presents an atomic force microscopy (AFM) technique for true three-dimensional (3D) characterization. The cantilever probe with flared tip was used in a home-made 3D-AFM system. The cantilever was driven by two shaking piezoceramics and oscillated around its vertical or torsional resonance frequency. The vertical resonance mode was used for upper surface imaging, and the torsional resonance mode was used for sidewall detecting. The 3D-AFM was applied to measure standard gratings with the height of 100 nm and 200 nm. The experiment results showed that the presented 3D-AFM technique was able to detect the small defect features on the steep sidewall and to reconstruct the 3D topography of the measured structure. Hindawi 2018-07-19 /pmc/articles/PMC6079385/ /pubmed/30116468 http://dx.doi.org/10.1155/2018/7606037 Text en Copyright © 2018 Lu Liu et al. http://creativecommons.org/licenses/by/4.0/ This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. |
spellingShingle | Research Article Liu, Lu Xu, Jianguo Zhang, Rui Wu, Sen Hu, Xiaodong Hu, Xiaotang Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode |
title | Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode |
title_full | Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode |
title_fullStr | Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode |
title_full_unstemmed | Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode |
title_short | Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode |
title_sort | three-dimensional atomic force microscopy for sidewall imaging using torsional resonance mode |
topic | Research Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6079385/ https://www.ncbi.nlm.nih.gov/pubmed/30116468 http://dx.doi.org/10.1155/2018/7606037 |
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