Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode

This article presents an atomic force microscopy (AFM) technique for true three-dimensional (3D) characterization. The cantilever probe with flared tip was used in a home-made 3D-AFM system. The cantilever was driven by two shaking piezoceramics and oscillated around its vertical or torsional resona...

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Detalles Bibliográficos
Autores principales: Liu, Lu, Xu, Jianguo, Zhang, Rui, Wu, Sen, Hu, Xiaodong, Hu, Xiaotang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Hindawi 2018
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6079385/
https://www.ncbi.nlm.nih.gov/pubmed/30116468
http://dx.doi.org/10.1155/2018/7606037

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6079385/
https://www.ncbi.nlm.nih.gov/pubmed/30116468
http://dx.doi.org/10.1155/2018/7606037

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