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An Improved Phase-Robust Configuration for Vibration Amplitude-Phase Extraction for Capacitive MEMS Gyroscopes
This paper presents for the first time an improved algorithm for vibration amplitude-phase information extraction of capacitive microelectromechanical systems (MEMS) gyroscopes. Amplitude and phase information resulting from the improved algorithm is insensitive to the phase variation of an interfac...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6082299/ https://www.ncbi.nlm.nih.gov/pubmed/30424295 http://dx.doi.org/10.3390/mi9070362 |