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An Improved Phase-Robust Configuration for Vibration Amplitude-Phase Extraction for Capacitive MEMS Gyroscopes

This paper presents for the first time an improved algorithm for vibration amplitude-phase information extraction of capacitive microelectromechanical systems (MEMS) gyroscopes. Amplitude and phase information resulting from the improved algorithm is insensitive to the phase variation of an interfac...

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Detalles Bibliográficos
Autores principales:	Zheng, Xudong, Liu, Siqi, Lin, Yiyu, Wu, Haibin, Teng, Lai, Jin, Zhonghe
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6082299/ https://www.ncbi.nlm.nih.gov/pubmed/30424295 http://dx.doi.org/10.3390/mi9070362

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