TiO(x)N(y) Modified TiO(2) Powders Prepared by Plasma Enhanced Atomic Layer Deposition for Highly Visible Light Photocatalysis

In this work, TiN film deposited by plasma enhanced atomic layer deposition (PEALD) is adopted to modify the commercial anatase TiO(2) powders. A series of analyses indicate that the surface modification of 20, 50 and 100 cycles of TiN by PEALD does not change the morphology, crystal size, lattice parameters, and surface area of TiO(2) nano powders, but forms an ultrathin amorphous layer of nitrogen doped TiO(2) (TiO(x)N(y)) on the powder surfaces. This ultrathin TiO(x)N(y) can facilitate the absorption of TiO(2) in visible light spectrum. As a result, TiO(x)N(y) coated TiO(2) powders exhibit excellent photocatalytic degradation towards methyl orange under the visible light with good photocatalytic stability compared to pristine TiO(2) powders. TiO(x)N(y) (100 cycles PEALD TiN) coated TiO(2) powders exhibit the excellent photocatalytic activity with the degradation efficiency of 96.5% in 2 hours, much higher than that of pristine TiO(2) powder of only 4.4%. These results clearly demonstrate that only an ultrathin surface modification layer can dramatically improve the visible light photocatalytic activity of commercial TiO(2) powders. Therefore, this surface modification using ALD is an extremely promising route to prepare visible light active photocatalysts.