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Fabrication of Polymer Microstructures of Various Angles via Synchrotron X-Ray Lithography Using Simple Dimensional Transformation

In this paper, we developed a method of fabricating polymer microstructures at various angles on a single substrate via synchrotron X-ray lithography coupled with simple dimensional transformations. Earlier efforts to create various three-dimensional (3D) features on flat substrates focused on the e...

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Autores principales: Park, Kyungjin, Kim, Kanghyun, Lee, Seung Chul, Lim, Geunbae, Kim, Jong Hyun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6119901/
https://www.ncbi.nlm.nih.gov/pubmed/30126129
http://dx.doi.org/10.3390/ma11081460
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author Park, Kyungjin
Kim, Kanghyun
Lee, Seung Chul
Lim, Geunbae
Kim, Jong Hyun
author_facet Park, Kyungjin
Kim, Kanghyun
Lee, Seung Chul
Lim, Geunbae
Kim, Jong Hyun
author_sort Park, Kyungjin
collection PubMed
description In this paper, we developed a method of fabricating polymer microstructures at various angles on a single substrate via synchrotron X-ray lithography coupled with simple dimensional transformations. Earlier efforts to create various three-dimensional (3D) features on flat substrates focused on the exposure technology, material properties, and light sources. A few research groups have sought to create microstructures on curved substrates. We created tilted microstructures of various angles by simply deforming the substrate from 3D to two-dimensional (2D). The microstructural inclination angles changed depending on the angles of the support at particular positions. We used convex, concave, and S-shaped supports to fabricate microstructures with high aspect ratios (1:11) and high inclination angles (to 79°). The method is simple and can be extended to various 3D microstructural applications; for example, the fabrication of microarrays for optical components, and tilted micro/nanochannels for biological applications.
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spelling pubmed-61199012018-09-05 Fabrication of Polymer Microstructures of Various Angles via Synchrotron X-Ray Lithography Using Simple Dimensional Transformation Park, Kyungjin Kim, Kanghyun Lee, Seung Chul Lim, Geunbae Kim, Jong Hyun Materials (Basel) Article In this paper, we developed a method of fabricating polymer microstructures at various angles on a single substrate via synchrotron X-ray lithography coupled with simple dimensional transformations. Earlier efforts to create various three-dimensional (3D) features on flat substrates focused on the exposure technology, material properties, and light sources. A few research groups have sought to create microstructures on curved substrates. We created tilted microstructures of various angles by simply deforming the substrate from 3D to two-dimensional (2D). The microstructural inclination angles changed depending on the angles of the support at particular positions. We used convex, concave, and S-shaped supports to fabricate microstructures with high aspect ratios (1:11) and high inclination angles (to 79°). The method is simple and can be extended to various 3D microstructural applications; for example, the fabrication of microarrays for optical components, and tilted micro/nanochannels for biological applications. MDPI 2018-08-17 /pmc/articles/PMC6119901/ /pubmed/30126129 http://dx.doi.org/10.3390/ma11081460 Text en © 2018 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Park, Kyungjin
Kim, Kanghyun
Lee, Seung Chul
Lim, Geunbae
Kim, Jong Hyun
Fabrication of Polymer Microstructures of Various Angles via Synchrotron X-Ray Lithography Using Simple Dimensional Transformation
title Fabrication of Polymer Microstructures of Various Angles via Synchrotron X-Ray Lithography Using Simple Dimensional Transformation
title_full Fabrication of Polymer Microstructures of Various Angles via Synchrotron X-Ray Lithography Using Simple Dimensional Transformation
title_fullStr Fabrication of Polymer Microstructures of Various Angles via Synchrotron X-Ray Lithography Using Simple Dimensional Transformation
title_full_unstemmed Fabrication of Polymer Microstructures of Various Angles via Synchrotron X-Ray Lithography Using Simple Dimensional Transformation
title_short Fabrication of Polymer Microstructures of Various Angles via Synchrotron X-Ray Lithography Using Simple Dimensional Transformation
title_sort fabrication of polymer microstructures of various angles via synchrotron x-ray lithography using simple dimensional transformation
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6119901/
https://www.ncbi.nlm.nih.gov/pubmed/30126129
http://dx.doi.org/10.3390/ma11081460
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