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Phosphorus monolayer doping (MLD) of silicon on insulator (SOI) substrates

This paper details the application of phosphorus monolayer doping of silicon on insulator substrates. There have been no previous publications dedicated to the topic of MLD on SOI, which allows for the impact of reduced substrate dimensions to be probed. The doping was done through functionalization...

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Detalles Bibliográficos
Autores principales:	Kennedy, Noel, Duffy, Ray, Eaton, Luke, O’Connell, Dan, Monaghan, Scott, Garvey, Shane, Connolly, James, Hatem, Chris, Holmes, Justin D, Long, Brenda
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Beilstein-Institut 2018
Materias:	Full Research Paper
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6122086/ https://www.ncbi.nlm.nih.gov/pubmed/30202683 http://dx.doi.org/10.3762/bjnano.9.199

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