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Aluminum plasmonic waveguides co-integrated with Si(3)N(4) photonics using CMOS processes
Co-integrating CMOS plasmonics and photonics became the “sweet spot” to hit in order to combine their benefits and allow for volume manufacturing of plasmo-photonic integrated circuits. Plasmonics can naturally interface photonics with electronics while offering strong mode confinement, enabling in...
Autores principales: | , , , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6127305/ https://www.ncbi.nlm.nih.gov/pubmed/30190537 http://dx.doi.org/10.1038/s41598-018-31736-4 |