Aluminum plasmonic waveguides co-integrated with Si(3)N(4) photonics using CMOS processes

Co-integrating CMOS plasmonics and photonics became the “sweet spot” to hit in order to combine their benefits and allow for volume manufacturing of plasmo-photonic integrated circuits. Plasmonics can naturally interface photonics with electronics while offering strong mode confinement, enabling in...

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Detalles Bibliográficos
Autores principales: Dabos, George, Manolis, Athanasios, Tsiokos, Dimitris, Ketzaki, Dimitra, Chatzianagnostou, Evangelia, Markey, Laurent, Rusakov, Dmitrii, Weeber, Jean-Claude, Dereux, Alain, Giesecke, Anna-Lena, Porschatis, Caroline, Wahlbrink, Thorsten, Chmielak, Bartos, Pleros, Nikos
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6127305/
https://www.ncbi.nlm.nih.gov/pubmed/30190537
http://dx.doi.org/10.1038/s41598-018-31736-4

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