3D Nanofabrication of High‐Resolution Multilayer Fresnel Zone Plates

Focusing X‐rays to single nanometer dimensions is impeded by the lack of high‐quality, high‐resolution optics. Challenges in fabricating high aspect ratio 3D nanostructures limit the quality and the resolution. Multilayer zone plates target this challenge by offering virtually unlimited and freely s...

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Detalles Bibliográficos
Autores principales: Sanli, Umut Tunca, Jiao, Chengge, Baluktsian, Margarita, Grévent, Corinne, Hahn, Kersten, Wang, Yi, Srot, Vesna, Richter, Gunther, Bykova, Iuliia, Weigand, Markus, Schütz, Gisela, Keskinbora, Kahraman
Formato: Online Artículo Texto
Lenguaje:English
Publicado: John Wiley and Sons Inc. 2018
Materias:
Full Papers
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6145245/
https://www.ncbi.nlm.nih.gov/pubmed/30250789
http://dx.doi.org/10.1002/advs.201800346

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