Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures

Atomically precise fabrication methods are critical for the development of next-generation technologies. For example, in nanoelectronics based on van der Waals heterostructures, where two-dimensional materials are stacked to form devices with nanometer thicknesses, a major challenge is patterning wi...

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Detalles Bibliográficos
Autores principales: Son, Jangyup, Kwon, Junyoung, Kim, SunPhil, Lv, Yinchuan, Yu, Jaehyung, Lee, Jong-Young, Ryu, Huije, Watanabe, Kenji, Taniguchi, Takashi, Garrido-Menacho, Rita, Mason, Nadya, Ertekin, Elif, Huang, Pinshane Y., Lee, Gwan-Hyoung, M. van der Zande, Arend
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6162276/
https://www.ncbi.nlm.nih.gov/pubmed/30266948
http://dx.doi.org/10.1038/s41467-018-06524-3

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